Contrast distortion induced by modulation voltage in scanning capacitance microscopy

  • M. N. Chang, C. W. Hu, T. H. Chou, Y. J. Lee
  • Applied Physics Letters, August 2012, American Institute of Physics
  • DOI: 10.1063/1.4747319

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http://dx.doi.org/10.1063/1.4747319

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