Ultra high density three dimensional capacitors based on Si nanowires array grown on a metal layer

P. H. Morel, G. Haberfehlner, D. Lafond, G. Audoit, V. Jousseaume, C. Leroux, M. Fayolle-Lecocq, T. Baron, T. Ernst
  • Applied Physics Letters, August 2012, American Institute of Physics
  • DOI: 10.1063/1.4746762