Four-dimensional spectral low-loss energy-filtered transmission electron tomography of silicon nanowire-based capacitors

G. Haberfehlner, P. Bayle-Guillemaud, G. Audoit, D. Lafond, P. H. Morel, V. Jousseaume, T. Ernst, P. Bleuet
  • Applied Physics Letters, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4742932