Investigating the role of hydrogen in silicon deposition using an energy-resolved mass spectrometer and a Langmuir probe in an Ar/H2 radio frequency magnetron discharge

S. L. Mensah, Hameed H. Naseem, Husam Abu-Safe, M. H. Gordon
  • Physics of Plasmas, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4740508