Proof of damage-free selective removal of thin dielectric coatings on silicon wafers by irradiation with femtosecond laser pulses

Tino Rublack, Martin Schade, Markus Muchow, Hartmut S. Leipner, Gerhard Seifert
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4739305