Analysis of doping induced wafer bow during GaN:Si growth on sapphire

F. Brunner, A. Mogilatenko, A. Knauer, M. Weyers, J.-T. Zettler
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4739278
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The following have contributed to this page: Prof. Dr. Markus Weyers