Top-down fabrication of single crystal silicon nanowire using optical lithography

Nor F. Za’bah, Kelvin S. K. Kwa, Leon Bowen, Budhika Mendis, Anthony O’Neill
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4737463
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The following have contributed to this page: Dr Budhika G Mendis