Room-temperature remote-plasma sputtering of c-axis oriented zinc oxide thin films

L. García-Gancedo, J. Pedrós, Z. Zhu, A. J. Flewitt, W. I. Milne, J. K. Luo, C. J. B. Ford
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4736541