Ion mass spectrometry investigations of the discharge during reactive high power pulsed and direct current magnetron sputtering of carbon in Ar and Ar/N2

Zs. Czigány, G. Greczynski, J. Jensen, L. Hultman, S. Schmidt
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4733692