Misfit dislocation gettering by substrate pit-patterning in SiGe films on Si(001)

  • Martyna Grydlik, Francesca Boioli, Heiko Groiss, Riccardo Gatti, Moritz Brehm, Francesco Montalenti, Benoit Devincre, Friedrich Schäffler, Leo Miglio
  • Applied Physics Letters, July 2012, American Institute of Physics
  • DOI: 10.1063/1.4733479

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http://dx.doi.org/10.1063/1.4733479

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