Picosecond laser structuring of thin film platinum layers covered with tantalum pentoxide isolation

Gerhard Heise, Daniel Trappendreher, Florian Ilchmann, Robin S. Weiss, Bernhard Wolf, Heinz Huber
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4733467
The author haven't yet claimed this publicationThe author haven't yet claimed this publication