Systematic studies of the nucleation and growth of ultrananocrystalline diamond films on silicon substrates coated with a tungsten layer

Chuan-pu Liu, Jyh-Ming Ting, Hsin-Li Lee, Yonhua Tzeng, Orlando Auciello, Yueh-Chieh Chu, Chia-Hao Tu, Gerald Jiang, Chi Chang
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4729798