Etch induced microwave losses in titanium nitride superconducting resonators

Martin Sandberg, Michael R. Vissers, Jeffrey S. Kline, Martin Weides, Jiansong Gao, David S. Wisbey, David P. Pappas
  • Applied Physics Letters, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4729623