Etch induced microwave losses in titanium nitride superconducting resonators

  • Martin Sandberg, Michael R. Vissers, Jeffrey S. Kline, Martin Weides, Jiansong Gao, David S. Wisbey, David P. Pappas
  • Applied Physics Letters, June 2012, American Institute of Physics
  • DOI: 10.1063/1.4729623

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