Epitaxial GaN films by hyperthermal ion-beam nitridation of Ga droplets

J. W. Gerlach, T. Ivanov, L. Neumann, Th. Höche, D. Hirsch, B. Rauschenbach
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4728166