Analysis of micromachined Fabry-Pérot cavities using phase-sensitive optical low coherence interferometry: Insight on dimensional measurements of dielectric layers

M. Malak, A.-F. Obaton, F. Marty, N. Pavy, S. Didelon, P. Basset, T. Bourouina
  • AIP Advances, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4727741