A polymer-based surface grating coupler with an embedded Si3N4 layer

Linghua Wang, Yanlu Li, Marco Garcia Porcel, Diedrik Vermeulen, Xiuyou Han, Jinyan Wang, Xigao Jian, Roel Baets, Mingshan Zhao, Geert Morthier
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4724335