Stress-based resonant volatile gas microsensor operated near the critically buckled state

Daniel J. Joe, Yoav Linzon, Vivekananda P. Adiga, Robert A. Barton, Moonkyung Kim, Bojan Ilic, Slava Krylov, Jeevak M. Parpia, Harold G. Craighead
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4720473
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