Solid-phase crystallization of ultra high growth rate amorphous silicon films

K. Sharma, M. V. Ponomarev, M. A. Verheijen, O. Kunz, F. D. Tichelaar, M. C. M. van de Sanden, M. Creatore
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4717951
The author haven't yet claimed this publicationThe author haven't yet claimed this publication