Dynamical process of KrF pulsed excimer laser crystallization of ultrathin amorphous silicon films to form Si nano-dots

Guran Chen, Jun Xu, Wei Xu, Hongcheng Sun, Weiwei Mu, Shenghua Sun, Zhongyuan Ma, Xinfan Huang, Kunji Chen
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4716467