Measurement of bonding energy in an anhydrous nitrogen atmosphere and its application to silicon direct bonding technology

F. Fournel, L. Continni, C. Morales, J. Da Fonseca, H. Moriceau, F. Rieutord, A. Barthelemy, I. Radu
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4716030