Enhanced sheath heating in capacitively coupled discharges due to non-sinusoidal voltage waveforms

  • T. Lafleur, R. W. Boswell, J. P. Booth
  • Applied Physics Letters, May 2012, American Institute of Physics
  • DOI: 10.1063/1.4712128

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http://dx.doi.org/10.1063/1.4712128

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