The use of optical microscopy to examine crystallite nucleation and growth in thermally annealed plasma enhanced chemical vapor deposition and hot wire chemical vapor deposition a-Si:H films

A. H. Mahan, M. S. Dabney, R. C. Reedy, D. Molina, D. S. Ginley
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4712045
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