Conformal growth of Mo/Si multilayers on grating substrates using collimated ion beam sputtering

D. L. Voronov, P. Gawlitza, R. Cambie, S. Dhuey, E. M. Gullikson, T. Warwick, S. Braun, V. V. Yashchuk, H. A. Padmore
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4710985