Vertically integrated double-layer on-chip silicon membranes for 1-to-12 waveguide fanouts

  • Yang Zhang, Amir Hosseini, Jaehyun Ahn, David N. Kwong, Babak Fallahazad, Emanuel Tutuc, Ray T. Chen
  • Applied Physics Letters, April 2012, American Institute of Physics
  • DOI: 10.1063/1.4709489

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http://dx.doi.org/10.1063/1.4709489

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