Removal of amorphous C and Sn on Mo:Si multilayer mirror surface in Hydrogen plasma and afterglow

O. V. Braginsky, A. S. Kovalev, D. V. Lopaev, E. M. Malykhin, T. V. Rakhimova, A. T. Rakhimov, A. N. Vasilieva, S. M. Zyryanov, K. N. Koshelev, V. M. Krivtsun, Maarten van Kaampen, D. Glushkov
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4709408
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The following have contributed to this page: Dr Dmitry Viktorovich Lopaev