Homogeneous and elongation-free 3D microfabrication by a femtosecond laser pulse and hologram

M. Yamaji, H. Kawashima, J. Suzuki, S. Tanaka, M. Shimizu, K. Hirao, Y. Shimotsuma, K. Miura
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.4705286