Fast programming metal-gate Si quantum dot nonvolatile memory using green nanosecond laser spike annealing

Yu-Chung Lien, Jia-Min Shieh, Wen-Hsien Huang, Cheng-Hui Tu, Chieh Wang, Chang-Hong Shen, Bau-Tong Dai, Ci-Ling Pan, Chenming Hu, Fu-Liang Yang
  • Applied Physics Letters, January 2012, American Institute of Physics
  • DOI: 10.1063/1.3700729