Modulation of effective Schottky barrier height of nickel silicide on silicon using pre-silicide ammonium sulfide treatment

Phyllis S. Y. Lim, Dong Zhi Chi, Poh Chong Lim, Yee-Chia Yeo
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.3700224