Electrostatically coupled vibration modes in unimorph complementary microcantilevers

V. Lebedev, N. Heidrich, F. Knöbber, R. E. Sah, W. Pletschen, B. Raynor, V. Polyakov, V. Cimalla, O. Ambacher
  • Applied Physics Letters, January 2012, American Institute of Physics
  • DOI: 10.1063/1.3697647