Second-harmonic generation reveals the oxidation steps in semiconductor processing

M. K. Vanbel, V. K. Valev, B. Vincent, V. V. Afanas’ev, J.-P. Locquet, S. Van Elshocht, M. Caymax, T. Verbiest
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.3695989
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