Etching properties and electrical characterization of surfaces of silicon-on-insulator substrates in presence of halogens

A. Abbadie, G. Hamaide, D. Mariolle, M. Chaupin, F. Brunier, E. Martinez, J. Mähliß
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.3695455