Complementary metal-oxide-semiconductor-compatible and self-aligned catalyst formation for carbon nanotube synthesis and interconnect fabrication

Can Zhang, Feng Yan, Bernhard C. Bayer, Raoul Blume, Marleen H. van der Veen, Rongsi Xie, Guofang Zhong, Bingan Chen, Axel Knop-Gericke, Robert Schlögl, Bernard D. Capraro, Stephan Hofmann, John Robertson
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.3694678
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