Improved conductivity of aluminum-doped ZnO: The effect of hydrogen diffusion from a hydrogenated amorphous silicon capping layer

M. V. Ponomarev, K. Sharma, M. A. Verheijen, M. C. M. van de Sanden, M. Creatore
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.3692439