High power impulse magnetron sputtering discharges: Instabilities and plasma self-organization

A. P. Ehiasarian, A. Hecimovic, T. de los Arcos, R. New, V. Schulz-von der Gathen, M. Böke, J. Winter
  • Applied Physics Letters, January 2012, American Institute of Physics
  • DOI: 10.1063/1.3692172