Influence of plasma-generated negative oxygen ion impingement on magnetron sputtered amorphous SiO2 thin films during growth at low temperatures

M. Macias-Montero, F. J. Garcia-Garcia, R. Álvarez, J. Gil-Rostra, J. C. González, J. Cotrino, A. R. Gonzalez-Elipe, A. Palmero
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.3691950