Direct imaging and optical activities of stacking faults in 4H-SiC homoepitaxial films

Bin Chen, Hirofumi Matsuhata, Kazuhiro Kumagai, Takashi Sekiguchi, Kyouichi Ichinoseki, Hajime Okumura
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.3691595