Dopant characterization in self-regulatory plasma doped fin field-effect transistors by atom probe tomography

  • H. Takamizawa, Y. Shimizu, Y. Nozawa, T. Toyama, H. Morita, Y. Yabuuchi, M. Ogura, Y. Nagai
  • Applied Physics Letters, February 2012, American Institute of Physics
  • DOI: 10.1063/1.3690864

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http://dx.doi.org/10.1063/1.3690864

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