Study of focused-ion-beam–induced structural and compositional modifications in nanoscale bilayer systems by combined grazing incidence x ray reflectivity and fluorescence

Erhan Arac, David M. Burn, David S. Eastwood, Thomas P. A. Hase, Del Atkinson
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.3689016
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