Direct measurements and numerical simulations of gas charging in microelectromechanical system capacitive switches

  • A. Venkattraman, A. Garg, D. Peroulis, A. A. Alexeenko
  • Applied Physics Letters, February 2012, American Institute of Physics
  • DOI: 10.1063/1.3688176

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http://dx.doi.org/10.1063/1.3688176

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