Experimental observation and analytical model of the stress gradient inversion in 3C-SiC layers on silicon

M. Zielinski, J. F. Michaud, S. Jiao, T. Chassagne, A. E. Bazin, A. Michon, M. Portail, D. Alquier
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.3687370
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