Evolution of SiHx hydrides during the phase transition from amorphous to nanocrystalline silicon films

C. Garozzo, R. A. Puglisi, C. Bongiorno, C. Spinella, S. Mirabella, R. Reitano, S. Di Marco, M. Foti, S. Lombardo
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.3686136