Effect of Si and C concentration on the microstructure, and the mechanical, tribological and electrochemical properties of nanocomposite TiC/a-SiC:H/a-C:H coatings prepared by plasma enhanced chemical vapor deposition

Duanjie Li, Salim Hassani, Suzie Poulin, Jerzy A. Szpunar, Ludvik Martinu, Jolanta E. Klemberg-Sapieha
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.3684602
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