Grown-in precipitates in heavily phosphorus-doped Czochralski silicon

Yuheng Zeng, Xiangyang Ma, Jiahe Chen, Weijie Song, Weiyan Wang, Longfei Gong, Daxi Tian, Deren Yang
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.3682112
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