Multi-step ion beam etching of sub-30 nm magnetic tunnel junctions for reducing leakage and MgO barrier damage

Sung-woo Chun, Daehong Kim, Jihun Kwon, Bongho Kim, Seonjun Choi, Seung-Beck Lee
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.3679153
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