Influence of surface bow on reconstruction on 2-inch SiC (0001) wafer

Ming-Xing Zhu, Yi Chen, Biao Shi, Xue-Chao Liu, Shao-Hui Chang, Cheng-Feng Yan, Jian-Hua Yang, Er-Wei Shi
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.3679130
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