Determination of the composition and thickness of semi-polar and non-polar III-nitride films and quantum wells using X-ray scattering

M. E. Vickers, J. L. Hollander, C. McAleese, M. J. Kappers, M. A. Moram, C. J. Humphreys
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.3678631
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