Ge redistribution in SiO2/SiGe structures under thermal oxidation: Dynamics and predictions

Ethan Long, Alexander Azarov, Frode Klo̸w, Augustinas Galeckas, Andrej Yu Kuznetsov, Spyridon Diplas
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.3677987
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