Conformal doping mechanism for fin field effect transistors by self-regulatory plasma doping with AsH3 plasma diluted with He

Yuichiro Sasaki, Katsumi Okashita, Bunji Mizuo, Masafumi Kubota, Mototsugu Ogura, Osamu Nishijima
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.3676579