Dry-etching damage to magnetic anisotropy of Co-Pt dot arrays characterized using anomalous Hall effect

T. Shimatsu, H. Kataoka, K. Mitsuzuka, H. Aoi, N. Kikuchi, O. Kitakami
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.3676061