Optical and structural characterization of thermal oxidation effects of erbium thin films deposited by electron beam on silicon

Himani S. Kamineni, Vimal K. Kamineni, Richard L. Moore, Spyros Gallis, Alain C. Diebold, Mengbing Huang, Alain E. Kaloyeros
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.3675278